Design and Fabrication of Rf-mems Switch for V-band Reconfigurable Application

نویسندگان

  • T. M. Vu
  • G. Prigent
  • J. Ruan
  • R. Plana
چکیده

This paper presents a study of RF MEMS switch designed to be integrated in tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, we go into detail of each procedure to present a complete study from design to fabrication and characterization of a RF-MEMS switch. The proposed concepts are validated by experimental results.

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تاریخ انتشار 2012